I. Introduction

This series of valves is pneumatically driven. It has reasonable structure design, beautiful appearance, stable operation, small impact vibration, reliable use, good sealing performance and long service life. It is one of the preferred valves for vacuum equipment automation in the semiconductor industry. . The valve is driven by compressed air to push the cylinder. The moving rod is pushed (pulled) by the transmission rod, and the driving body moves along the axial direction. The driving body is connected with the valve plate through the swing rod and drives the valve plate to open and close. The medium of the valve is air and non-corrosive gases.

II. Features

The support structure is evenly distributed by using multiple swing bars, the valve plate is evenly stressed, the valve opening shock vibration is small, and the noise is low;

The four rollers support the movement mechanism, the movement is stable, and the motion noise is small;

The dynamic seal is sealed by a bellows, and the other seals are made of fluororubber, which is reliable in sealing;

The valve body is welded inside stainless steel, and the leakage rate is small;

In a smaller volume, more workpieces are used at one time, and space is used reasonably.