I. Introduction

This valve is a control plug-in valve with stepping motor. It has reasonable structure design, beautiful appearance, high precision, reliable use and long service life. It can be widely used to adjust the opening degree of the valve to control the flow. Ultra high vacuum equipment. The valve is driven by the stepping motor drive torque, and the moving rod mechanism is pushed (pulled) by the transmission rod, and the driving body moves along the axial direction, and the driving body is connected with the valve plate through the swing rod or the steel ball to complete the opening and closing of the valve plate. action. The valve acts as a throttling element and is driven by the drive, stepper motor and controller, where the controller provides a position control mode that allows the control valve to be at any desired position at the selected speed, while the power control is also It can be adjusted manually. When the power is controlled, it is controlled by pulse signal, and the speed is fast and the positioning is accurate. The medium of the valve is air and non-corrosive gases.

II. Features

The shaft seal is a bellows seal, and the other seals are fluororubber, no lubricant design;

The valve body is welded inside stainless steel, and the leakage rate is small;

The valve body adopts a rib structure, which is small in size, light in weight and beautiful in appearance;

The utility model adopts a double-track bearing roller mechanism, and the movement is stable; the valve plate has an integral structure and the supporting force is uniform;

The stepping motor is driven, and the valve plate opening position of the valve is arbitrarily adjustable, which can be used to adjust the flow rate.